4. Gas separation: processes
  5. With control responsive to sensed condition
  6. Gas flow rate sensed

David Bruce Burgess

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Method and apparatus for preventing debris contamination of...

Optical: systems and elements – Protection from moisture or foreign particle – Fluid directed across optical element
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System for collecting and filtering imaging by-products

Gas separation: processes – With control responsive to sensed condition – Gas flow rate sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2926350

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