4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Trench capacitor

Daniel Köhler

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Method for fabricating an insulation collar in a trench...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Method of etching a layer in a trench and method of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2785871

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