4. Coating processes
  5. Coating by vapor, gas, or smoke

Dan Vitkavage

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Diffusion barrier and etch stop films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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PECVD methods for producing ultra low-k dielectric films...

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2253535

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