4. Material or article handling
  5. Movable rack having superposed, charge-supporting elements,...
  6. Rotating or circulating rack

Cornelis Marinus Kooijman

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Method and device for transferring wafers

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Method for purging a furnace and furnace assembly

Heating – Processes of heating or heater operation – Including apparatus purging – cleaning or accretion preventing
Reexamination Certificate

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Storage assembly for wafers

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rotating or circulating rack
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2474790

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