4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Conor Patrick O'Carroll

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Heating device for heating semiconductor wafers in thermal...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Windows used in thermal processing chambers

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2618646

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