4. Electricity: electrothermally or thermally actuated switches
  5. Electrothermally actuated switches
  6. With longitudinally expansible solid element

Commissariat a L'Energie Atomique

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Method for making a thin film using pressurization

Semiconductor device manufacturing: process – Thinning or removal of substrate
Reexamination Certificate

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Micro-device with thermal actuator

Electricity: electrothermally or thermally actuated switches – Electrothermally actuated switches – With longitudinally expansible solid element
Reexamination Certificate

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