4. Electricity: measuring and testing
  5. Impedance, admittance or other quantities representative of...
  6. Lumped type parameters

Ciaran O'Morain

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Method for fault detection in a plasma process

Electricity: measuring and testing – Using ionization effects
Reexamination Certificate

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RF current sensor

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2555986

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