4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Chung-Hun Park

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Heater assembly for heating a wafer

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Method and apparatus for measuring inclination angle of ion...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Polarity exchanger and ion implanter having the same

Radiant energy – Ionic separation or analysis – Cyclically varying ion selecting field means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2713448

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