4. Optical: systems and elements
  5. Light interference

Christoph Friedrich

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Alternating phase mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Contact hole fabrication with the aid of mutually crossing...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Generating mask layout data for simulation of lithographic...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Lithography method and lithography mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Trimming mask with semitransparent phase-shifting regions

Optical: systems and elements – Light interference
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Profile ID: LFUS-PAI-P-2528770

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