4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Christofer Silvenius

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Method to GaAs based lasers and a GaAs based laser

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method to GaAs based lasers and a GaAs based laser

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With heterojunction
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2688360

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