4. Coating apparatus
  5. Gas or vapor deposition

Chris Werkhoven

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Apparatus and methods for isolating chemical vapor reactions...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and methods for isolating chemical vapor reactions...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Situ dielectric stacks

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2351104

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