4. Fluid handling
  5. Processes
  6. Cleaning, repairing, or assembling

Chiliang L. Chen

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Electronically actuated valve

Fluid handling – Processes – Cleaning – repairing – or assembling
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Remote plasma cleaning source having reduced reactivity with...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-3078470

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