4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Chii Lee

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Magnetically enhanced inductively coupled plasma reactor...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Plasma assisted processing chamber with separate control of...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2480630

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