4. Measuring and testing
  5. Vibration
  6. Sensing apparatus

Chih-Pen Yen

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Method and apparatus for early detection of material...

Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Reexamination Certificate

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Ultrasonic wafer blade vibration detecting

Measuring and testing – Vibration – Sensing apparatus
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2745742

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