4. Coating apparatus
  5. Projection or spray type

Chia-Lin Yeh

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Piping system for etch equipment

Coating apparatus – Projection or spray type
Reexamination Certificate

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Rinsing lid for wet bench

Cleaning and liquid contact with solids – Apparatus – With spray or jet supplying and/or applying means
Reexamination Certificate

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Sleeve for an adapter flange of the gasonics L3510 etcher

Electric heating – Metal heating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2050638

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