4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Chi-Kang Liu

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Increasing programming silicide process window by forming...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of silicon oxynitride ARC removal after gate etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Silicon implant in a salicided cobalt layer to reduce...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2525688

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