4. Radiant energy
  5. Ion generation
  6. Arc type

Chi-Fu Yu

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Apparatus and method for detecting tilt angle of a wafer...

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate

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Arc chamber filament for ion implanter

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Auto-centering device for mechanical clamp

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2683326

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