4. Optical: systems and elements
  5. Optical modulator
  6. Light wave directional modulation

Chen-Wei Chiu

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Method of fabricating micromachined devices

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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Silicon micromachined optical device

Optical: systems and elements – Optical modulator – Light wave directional modulation
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Profile ID: LFUS-PAI-P-2649402

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