4. Electrical resistors
  5. Strain gauge type

Boston MicroSystems, Inc.

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Electrochemical etching process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Micromechanical device with an epitaxial layer

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Micromechanical piezoelectric device

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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P-n junction sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Semiconductor piezoresistor

Electrical resistors – Strain gauge type
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