4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal

Blakely Zokoloff Taylor & Zafman LLP

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Compliant wafer chuck

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Focusing system using light source and image sensor

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
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Method and apparatus for restarting a write operation in a...

Dynamic information storage or retrieval – Condition indicating – monitoring – or testing – Including radiation storage or retrieval
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