4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Birgit Morris

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Apparatus and method for detecting an end point of chamber...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Method for processing substrates using gaseous silicon...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of forming a thin film for a semiconductor device

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
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Oxide etch process with high selectivity to nitride suitable...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma etch processes

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2028133

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