4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Bi-Troug Chen

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Method of avoiding dielectric arcing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Reliability improvement of SiOC etch with trimethylsilane...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2694434

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