4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Heterojunction device
  6. Field effect transistor

Bernd-Ulrich H. Klepser

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Si/SiGe optoelectronic integrated circuits

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor
Reexamination Certificate

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Si/SiGe optoelectronic integrated circuits

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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