4. Data processing: measuring, calibrating, or testing
  5. Measurement system in a specific environment
  6. Chemical analysis

Barry M. Wise

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Methods for characterizing, classifying, and identifying...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
Reexamination Certificate

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Methods for characterizing, classifying, and identifying...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
Reexamination Certificate

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System and method for determining endpoint in etch processes...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2493074

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