4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Angular rate using gyroscopic or coriolis effect

Aurea Cuccia

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Integrated angular speed sensor device and production method...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Production method for integrated angular speed sensor device

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Profile ID: LFUS-PAI-P-2054607

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