4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Moving the base

Arun Madan

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Semiconductor vacuum deposition system and method having a...

Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate

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Semiconductor vacuum deposition system and method having a...

Coating processes – Coating by vapor – gas – or smoke – Moving the base
Reexamination Certificate

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