4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Armand Ferro

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In situ growth of oxide and silicon layers

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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In situ growth of oxide and silicon layers

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
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In situ growth of oxide and silicon layers

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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Wafer holder

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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Profile ID: LFUS-PAI-P-2095585

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