4. Semiconductor device manufacturing: process
  5. With measuring or testing
  6. Electrical characteristic sensed

Anthony John Toprac

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Adaptive sampling method for improved control in...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Automated process monitoring and analysis system for...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Determining endpoint in etching processes using principal...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Determining endpoint in etching processes using principal...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Determining endpoint in etching processes using real-time...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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