4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Anon, Inc.

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Cluster tool architecture for sulfur trioxide processing

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Process for ashing organic materials from substrates

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Process for ashing organic materials from substrates

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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