4. Data processing: measuring, calibrating, or testing
  5. Measurement system
  6. Dimensional determination

Ann P. Waldhauer

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Method for in-situ cleaning of surfaces in a substrate...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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Method of determining a wafer characteristic using a film...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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Permanently mounted reference sample for a substrate measurement

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
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Profile ID: LFUS-PAI-P-1939313

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