Electrical generator or motor structure
Non-dynamoelectric
Thermal or pyromagnetic
Inventor
active
In-plane MEMS thermal actuator and associated fabrication...
Methods of fabricating in-plane MEMS thermal actuators
Microelectromechanical actuators including sinuous beam...
Microelectromechanical systems including thermally actuated...
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Profile ID: LFUS-PAI-P-2082143