4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Allan L. Sagle

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Method and apparatus for dynamic space-time imaging system

Image analysis – Applications – Range or distance measuring
Reexamination Certificate

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Minimization of electron fogging in electron beam lithography

Radiant energy – Radiation controlling means
Reexamination Certificate

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Multiple electron beam lithography system with multiple beam...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Raster shaped beam, electron beam exposure strategy using a...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2078266

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