4. Valves and valve actuation
  5. Electrically actuated valve
  6. Including solenoid

Alexandra Jauernig

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Methods for manufacturing a microstructured sensor

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Micromechanical component production method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Microvalve and method for manufacturing a microvalve

Valves and valve actuation – Electrically actuated valve – Including solenoid
Patent

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Microvalve and method for manufacturing a microvalve

Valves and valve actuation – Electrically actuated valve
Patent

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Profile ID: LFUS-PAI-P-688383

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