4. Organic compounds -- part of the class 532-570 series
  5. Organic compounds
  6. Carbohydrates or derivatives

Alan J. Miller

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Apparatus and method for controlling etch depth

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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In situ and ex situ hardmask process for STI with oxide...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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In situ and ex situ hardmask process for STI with oxide...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of achieving top rounding and uniform etch depths...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of achieving top rounding and uniform etch depths...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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