4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Ajay Saproo

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Annealing process for low-k dielectric film

Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate

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Method for preparing nitrogen surface treated fluorine doped sil

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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Predictive wafer temperature control system and method

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1760149

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