4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus

Advanced Silicon Materials LLC

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Chemical vapor deposition system for polycrystalline silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Chemical vapor deposition system for polycrystalline silicon...

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Reexamination Certificate

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Chemical vapor deposition system for polycrystalline silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Method for inducing controlled cleavage of polycrystalline...

Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
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Rod replenishment system for use in single crystal silicon...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
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