4. Coating apparatus
  5. Gas or vapor deposition
  6. Having means to expose a portion of a substrate to coating...

Adrienne Gould-Choquette

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Deposition apparatus and related method with controllable...

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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Method of chemical vapor depositing tungsten films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2099751

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