4. Semiconductor device manufacturing: process
  5. With measuring or testing
  6. Optical characteristic sensed

Aaron T. Bartlett

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Endpoint stabilization for polishing process

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Endpoint stabilization for polishing process

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Method for attaching web based polishing materials together...

Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – Means joining flexible indefinite length or endless bodies...
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Method for attaching web-based polishing materials together...

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor
Reexamination Certificate

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Planarizing pads, planarizing machines, and methods for...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
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Profile ID: LFUS-PAI-P-2040160

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