Apparatus and method for automatically identifying chemical spec

Boots – shoes – and leggings


Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0


364552, 364550, 156626, 20419233, H01L 21306, C23F 102, G06F 1520




A method and apparatus to control the plasma environment in a semiconductor or thin-film fabrication chamber. The apparatus and method include a means for measuring an optical emission spectrum of the chemical species in the plasma and a library containing a multiplicity of predefined spectral patterns. A processor automatically correlates the spectrum with the predefined spectral patterns in the library, and yields a correlation value for all the correlations. A subset of the predefined spectral patterns based upon the highest correlation values are selected and used to identify the chemical species and abundances thereof in the plasma. A comparator compares the subset with a target set of plasma species and abundances and a control signal generator generates a control signal in response to the comparison to control the chamber environment. In a preferred embodiment, the control signal controls the plasma environment in the reactor chamber when said subset differs from said target set by a predefined amount.

patent: 3434545 (1969-03-01), Bombardieri
patent: 3831030 (1974-08-01), Wrobel et al.
patent: 3986761 (1976-10-01), Redington
patent: 4008388 (1977-02-01), McLafferty et al.
patent: 4301369 (1981-11-01), Matsuo et al.
patent: 4309385 (1982-01-01), Harada et al.
patent: 4365303 (1982-12-01), Hannah et al.
patent: 4493745 (1985-01-01), Chen et al.
patent: 4584886 (1986-04-01), Matsunaga et al.
patent: 4620058 (1986-10-01), Winterling et al.
patent: 4620284 (1986-10-01), Schnell et al.
patent: 4637938 (1987-01-01), Lee et al.
patent: 4676868 (1987-06-01), Riley et al.
patent: 4754141 (1988-06-01), Mindock
patent: 4847792 (1989-07-01), Barna et al.
Savage, Dr. Richard N. and Lettire, Kevin C., "Characterizing Reactive Plasma Chemistries," Microelectronic Manufacturing and Testing, (Nov. 1986).
Savage, Richard N., "Applications of Optical Emission Spectroscopy to Semiconductor Processing," Spectroscopy, vol. 2 (No. 8), pp. 40-42, (1987).
UTI Instruments Company, "The Intelligent Way to Control the Environment Inside Your Processes," ISS-325 Intelligent Sampling Systems, (Sunnyvale Calif. 1984).
Linda Powell , Computer Search and Indentification of Infrared Spectra by Correlation Techniques, Indiana University, Bloomington, Ind., (1977).


Say what you really think

Search for the USA inventors and patents. Rate them and share your experience with other people.


Apparatus and method for automatically identifying chemical spec does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for automatically identifying chemical spec, we encourage you to share that experience with our community. Your opinion is very important and Apparatus and method for automatically identifying chemical spec will most certainly appreciate the feedback.

Rate now


Profile ID: LFUS-PAI-O-944741

All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.