Wafer polisher

Details Wafer polisher Wafer polisher

2006-06-06

2006-06-06

Morgan, Eileen P. (Department: 3723)

Abrading

Machine

Rotary tool

C451S287000, C451S397000, C451S398000

Reexamination Certificate

active

07056196

ABSTRACT:
A wafer polisher, wherein a retainer ring (28) is installed in a wafer holding head (14), a protective sheet material (52) is disposed inside the retainer ring (28), and a wafer (W) is pressed against a polishing pad (20) through the protective sheet material (52) for polishing, whereby the protective sheet material (52) can be disposed without causing wrinkles on the inner peripheral part of the retainer ring (28).

REFERENCES:
patent: 6273804 (2001-08-01), Numoto
patent: 6277010 (2001-08-01), Perlov et al.
patent: 6358121 (2002-03-01), Zuniga
patent: 6494774 (2002-12-01), Zuniga et al.
patent: 6527624 (2003-03-01), Tolles et al.
patent: 6540590 (2003-04-01), Kajiwara et al.
patent: 6641461 (2003-11-01), Wang et al.
patent: 6663466 (2003-12-01), Chen et al.
patent: 6705932 (2004-03-01), Zuniga et al.
patent: 6722965 (2004-04-01), Zuniga et al.

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