Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
Patent
1997-03-11
1998-08-11
Schofer, Joseph L.
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Polymers from only ethylenic monomers or processes of...
526319, 526334, C08F22400, C08F21808, C08F21612
Patent
active
057928231
ABSTRACT:
A vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer, a vinyl 4-tetrahydropyranyloxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer and a preparation method thereof are provided. The copolymers have excellent transparency because they are very low in optical absorbance in the deep uv range. In addition, the acetal structure in the backbone and in the substituted groups endows the photoresist of the copolymer with superior dry etch resistance.
REFERENCES:
patent: 4115128 (1978-09-01), Kita
patent: 4491628 (1985-01-01), Ito et al.
Kim Hyun Woo
Kim Jin Baek
Kim Jin Seuk
Cheng Wu C.
Hyundai Electronics Industries Co,. Ltd.
Korea Advanced Institute of Science and Technology
Nath Gary M.
Schofer Joseph L.
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