Vapor deposition apparatus

Details Vapor deposition apparatus Vapor deposition apparatus

2006-07-04

2006-07-04

Bueker, Richard (Department: 1763)

Coating apparatus

Gas or vapor deposition

Running length work

C118S726000, C392S389000, C427S069000

Reexamination Certificate

active

07070658

ABSTRACT:
A vapor deposition apparatus, developed in particular for on-line deposition of phosphor or scintillator material, wherein said vapor deposition apparatus comprises a crucible containing a mixture of raw materials, a chimney having at least one inlet in communication with the said crucible and a linear slot outlet, one or more lineair heating elements, contained within said chimney, an oven surrounding said crucible, wherein said oven contains heating elements, shielding elements and cooling elements.

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