Thin film electrode for forming ohmic contact in light...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum

Reexamination Certificate

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C257S094000, C257S101000, C257S103000

Reexamination Certificate

active

06989598

ABSTRACT:
Disclosed herein is a technique for forming a high quality ohmic contact utilizable in the fabrication of short-wavelength light emitting diodes (LEDs) emitting blue and green visible light and ultraviolet light, and laser diodes (LDs) using a gallium nitride (GaN) semiconductor.The ohmic contact is formed by depositing a nickel (Ni)-based solid solution on top of a p-type gallium nitride semiconductor. The ohmic contact thus formed has an excellent current-voltage characteristic and a low specific contact resistance due to an increased effective carrier concentration around the surface of the gallium nitride layer, as well as a high transmittance in the short-wavelength region.

REFERENCES:
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patent: 6693352 (2004-02-01), Huang et al.
patent: 2002/0185732 (2002-12-01), Ho et al.
patent: 11040846 (1999-02-01), None
patent: 2001-035796 (2001-02-01), None
European Search Report issued by the European Patent Office on Jul. 8, 2004 in corresponding application EP 04251791.2-2203.
A. Azens et al., “Highly transparent Ni-Mg and Ni-V-Mg oxide films for electrochromic applications,” Elsevier Science B.V., May 14, 2002.
A. Azens, J. Isidorsson, R. Karmhag, and C.G. Granqvist, “Highly Transparent Ni-Mg and Ni-V-Mg Oxide Films For Electrochromic Applications”, Thin Solid Films, Elsevier Science B.V., May 14, 2002, pp. 1-3.
M.H.G. Jacobs and P.J. Spencer, “A Critical Thermodynamic Evaluation of The System MG-NI”, Pergamon, Calphad vol. 22, No. 4, pp. 513-525, 1998.

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