Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1974-12-18
1977-12-13
Kaplan, G. L.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204 15, 204279, 204290R, 204290F, G01N 2730, G01N 2750
Patent
active
040627500
ABSTRACT:
A thin film polarographic oxygen sensor, in which a number of thin film microcathodes are deposited in holes in a thin film layer of silicon dioxide formed on a silicon substrate. A single thin film anode layer is deposited on the insulating layer and is insulated thereby from the cathodes. Preferably the microcathodes and the anode are located in a well in the thin film insulating layer, the well being filled flush to its surface with electrolyte, and having a thin film polymer filter membrane deposited thereover. Contacts to the anode and cathodes may be punched through a thin film insulating layer on the back of the wafer, the cathode contact being thereby connected to the substrate, and the anode contact being insulated from the substrate by an encircling thin film layer of silicon dioxide and extending through to the anode metallization layer. With appropriate choice of electrode, electrolyte and membrane materials, the cell may also be used as a pH sensor, a CO.sub.2 sensor, a specific ion sensor, or to detect or sense other substances in solution. Single electrode units may also be formed by depositing thin film electrode materials on appropriate substrates.
REFERENCES:
patent: 3162589 (1964-12-01), Pensak
patent: 3188251 (1965-06-01), Straight et al.
patent: 3313721 (1967-04-01), Teel
patent: 3449221 (1969-06-01), Thomas
patent: 3462349 (1969-08-01), Georenyi
patent: 3926747 (1975-12-01), Newby et al.
LandOfFree
Thin film electrochemical electrode and cell does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thin film electrochemical electrode and cell, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film electrochemical electrode and cell will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-487854