Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Patent
1989-02-23
1990-07-24
Yuen, Henry C.
Heating
Work chamber having heating means
Having means by which work is progressed or moved mechanically
432241, 432253, F27B 904
Patent
active
049432346
ABSTRACT:
The invention proposes a process and equipment for the thermal treatment of semiconductor materials which contains an isothermal, all-round heated process tube in a so-called "closed-tube" process using a compact construction of the furnace, whereby a defined process gas atmosphere is present in the process chamber from the very start of the process and a reverse diffusion is prevented. A double-tube system is used here with an adjustable interspace rinsing, i.e. the use of the so-called "rapid cassette" in cold blowing. Applications for the invention are in particular the oxidation, diffusion, deposition and tempering of semiconductor discs.
REFERENCES:
patent: 3737282 (1973-06-01), Hearn et al.
patent: 3811825 (1974-05-01), Enderlin
patent: 4412812 (1983-11-01), Sadowski et al.
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