Polishing apparatus

Details Polishing apparatus Polishing apparatus

2005-07-12

2005-07-12

Nguyen, George (Department: 3723)

Abrading

Machine

Combined

C451S067000, C451S285000, C451S073000, C451S286000, C451S282000, C451S288000

Reexamination Certificate

active

06916231

ABSTRACT:
A polishing apparatus for polishing a workpiece has a polishing unit and a cleaning unit. The polishing unit has a polishing table having a polishing surface thereon, and a top ring for pressing the workpiece against the polishing surface. The cleaning unit has a rotatable shaft configured to be vertically movable, a holding mechanism mounted to the rotatable shaft for detachably holding the workpiece, and a plurality of cleaning devices disposed around the rotatable shaft for cleaning the workpiece which has been polished in the polishing unit.

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patent: 2001/0044266 (2001-11-01), Katsuoka et al.

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