Piezoelectric element, piezoelectric actuator, ink jet...

Details Piezoelectric element, piezoelectric actuator, ink jet... Piezoelectric element, piezoelectric actuator, ink jet...

2007-11-06

2007-11-06

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S317000, C347S048000, C333S186000, C252S06290R, C252S06290R

Reexamination Certificate

active

11130342

ABSTRACT:
A piezoelectric element includes a base substrate, a buffer layer formed above the base substrate, and a piezoelectric film formed above the buffer layer, wherein the buffer layer is formed of Pb ((Zr1-xTix)1-yNby)O3of a perovskite type, where x is in a range of 0≦x≦1, and y is in a range of 0.05≦y≦0.3, and the piezoelectric film is formed of a relaxor material of a perovskite type.

REFERENCES:
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patent: 5804907 (1998-09-01), Park et al.
patent: 6583688 (2003-06-01), Klee et al.
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patent: 7120978 (2006-10-01), Wasa et al.
patent: 7196457 (2007-03-01), Miyazawa et al.
patent: 2005/0185026 (2005-08-01), Noguchi et al.
patent: 2007/0090728 (2007-04-01), Matsuda et al.
patent: 2007/0090730 (2007-04-01), Fukui et al.
patent: 2001-223404 (2001-08-01), None

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