Piezoelectric device and method for fabricating the same

Details Piezoelectric device and method for fabricating the same Piezoelectric device and method for fabricating the same

1998-02-13

1999-11-30

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 41193

Patent

active

059948221

ABSTRACT:
A number of single crystal domains having crystal orientations different from each other cohere to form one grain, and a number of grains cohere to form a piezoelectric material. When a grain has a size exceeding a certain size, cracks take place in the surface of the grain. Because of generation of the cracks constraining forces from adjacent domains are weak, and a displacement which is substantially the same as a displacement ideal to piezoelectric material can be obtained.

REFERENCES:
patent: 4675123 (1987-06-01), Tsunooka et al.
patent: 4917810 (1990-04-01), Tsunooka et al.
patent: 5169551 (1992-12-01), Tsunooka et al.
patent: 5221872 (1993-06-01), Nishida et al.
patent: 5607614 (1997-03-01), Kawano et al.
patent: 5668071 (1997-09-01), Kashiwaya et al.
patent: 5792569 (1998-08-01), Sun et al.

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