Methods of manufacturing a lithography template

Details Methods of manufacturing a lithography template Methods of manufacturing a lithography template

2006-05-02

2006-05-02

Duda, Kathleen (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S313000

Reexamination Certificate

active

07037639

ABSTRACT:
A method for forming imprint lithography templates is described herein. The method includes forming a masking layer and a conductive layer on a substrate surface. The use of a conductive layer allows patterning of the masking layer using electron beam pattern generators. The substrate is etched using the patterned masking layer to produce a template.

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