Fishing – trapping – and vermin destroying
Patent
1988-12-07
1989-10-31
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437228, 437232, 437926, 437946, 156643, 427 35, 427 41, 427 541, 148DIG17, 148DIG21, 148DIG56, H01L 21205
Patent
active
048777579
ABSTRACT:
A processing apparatus and method for depositing a passivating layer on a mercury-cadmium-telluride wafer utilizing a single process chamber to provide oxygen gas to the chamber with the excitation energy being provided by a remotely generated plasma in order to remove any organic residue and then supplying either a sulfide or selenide gas in combination with illuminating the wafer with an in situ generated ultraviolet energy to produce a passivating layer.
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Davis Cecil J.
Luttmer Joseph D.
Smith Patricia B.
York Rudy L.
Barndt B. Peter
Comfort James T.
Hearn Brian E.
Pawbkowski Beverly A.
Sharp Melvin
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